A FABRICATION METHOD OF THIN PIEZOELECTRIC FILMS WITH HIGH PIEZOELECTRIC CONSTANT

摘要

PURPOSE: A fabrication method of thin piezoelectric films with high piezoelectric constant is provided to implement rapid reaction between materials by using a distillation with high temperature in manufacturing a PZT sol-gel solution. CONSTITUTION: In a fabrication method of thin piezoelectric films with high piezoelectric constant, a lead precursor is dissolved in C1-C10 alkoxy alcohol. The lead precursor solution is manufactured. A zirconium precursor and a titanium precursor are mixed in the C1-C10 alkoxy alcohol. A zirconium / titanium precursor solution is manufactured. The lead precursor solution and zirconium / titanium precursor solution are mixed. A PZT solution is manufactured. The C1-C10 alkoxy alcohol and ethylene glycol are added to the PZT solution. A PZT sol-gel solution is manufactured. The PZT sol-gel solution is heat-treated and is coated in the top of the substrate.