| 摘要 |
A multistage vacuum pump includes a stator housing a multistage rotor assembly, each stage having intermeshing Roots rotor components, wherein the tip radius of the rotor components at an inlet stage of the pump is larger than the tip radius of the rotor components at an exhaust stage of the pump, wherein a meshing clearance between the rotor components at the inlet stage of the pump is greater than a meshing clearance between the rotor components at the exhaust stage of the pump. |
