| 发明名称 |
ARC EVAPORATOR AND METHOD FOR OPERATING THE EVAPORATOR |
| 摘要 |
The invention relates to an arc evaporator which comprises at least one anode (4), a cathode (3) and a system for generating a magnetic field comprising a first subsystem consisting of a set of permanent magnets (8, 9) which produces a converging magnetic field component and a second subsystem comprising at least one coil (10) and configured to operate in at least a first operating mode in which it generates a second diverging magnetic field component. |
| 申请公布号 |
US2011315544(A1) |
申请公布日期 |
2011.12.29 |
| 申请号 |
US200813142164 |
申请日期 |
2008.12.26 |
| 申请人 |
GOIKOETXEA LARRINAGA JOSU;RUIZ DE GOPEGUI LLONA UNAI;GARMENDIA OTAEGI KEPA;DELGADO CASTRILLO ANDONI;FUNDACION TEKNIKER |
发明人 |
GOIKOETXEA LARRINAGA JOSU;RUIZ DE GOPEGUI LLONA UNAI;GARMENDIA OTAEGI KEPA;DELGADO CASTRILLO ANDONI |
| 分类号 |
C23C14/32 |
主分类号 |
C23C14/32 |
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