BELLOWS UNIT, SUBSTRATES TREATING APPARATUS INCLUDING THE UNIT, AND METHOD FOR CHECKING LEAK OF THE UNIT,申请号KR20090100274-传众专利搜索

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发明名称	BELLOWS UNIT, SUBSTRATES TREATING APPARATUS INCLUDING THE UNIT, AND METHOD FOR CHECKING LEAK OF THE UNIT
摘要
申请公布号	KR101099604(B1)	申请公布日期	2011.12.29
申请号	KR20090100274	申请日期	2009.10.21
申请人		发明人
分类号	H01L21/00	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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