| 摘要 |
<p>Abstract of the DisclosureIn a pulse power control, power amplitude (peak power) of output power is controlled to be constant against the fluctuation of the power, whereby it is possible to avoid aneffect on a load, which is caused by the fluctuation of the power amplitude of the output power. The pulse modulated RF power control method includes an output amplitude control step for controlling amplitude of a pulse output, and a duty control step for controlling a duty ratio of the pulse output. The outputamplitude control step performs a constant amplitude control to control an amplitude value of the pulse output so that the amplitude value becomes equal to a set amplitude value. The constant amplitude control according to the output amplitude control, for instance, gives a feedback of the amplitude valueof the pulse output outputted by the power control, obtains a difference value between the feedback value and the set amplitude value, and controls the amplitude value of the pulse output so that the difference value becomes zero.</p> |
