A NUCLEATION PROMOTION LAYER FORMED ON A SUBSTRATE TO ENHANCE DEPOSITION OF A TRANSPARENT CONDUCTIVE LAYER

摘要

Methods for forming a nucleation promotion layer prior to formation of a transparent conductive layer suitable for use in PV cells are provided. In one embodiment, the method includes forming a seed layer on a substrate by materials sputtered from a first target disposed in a reactive sputter processing chamber, and forming a transparent conductive layer on the seed layer by materials sputtered from a second target disposed in the reactive sputter processing chamber, wherein the first and the second target are fabricated by a containing material having dopants formed therein and dopant concentration formed in the first target is higher than the dopant concentration formed in the second target.