发明名称 |
MEASUREMENT SYSTEM, METHOD AND LITOGRAPHIC APPARATUS |
摘要 |
A measurement system is configured to derive a position quantity of an object, the measurement system includes at least one position quantity sensor configured to provide respective position quantity measurement signals; a position quantity calculator configured to determine a position quantity of the object from the position quantity measurement signal, wherein the position quantity calculator includes a torsion estimator configured to estimate a torsion of the object, the position quantity calculator being configured to correct the determined position quantity of the object for the estimated torsion.
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申请公布号 |
US2011317142(A1) |
申请公布日期 |
2011.12.29 |
申请号 |
US201113116934 |
申请日期 |
2011.05.26 |
申请人 |
COX HENRIKUS HERMAN MARIE;KOENEN WILLEM HERMAN GERTRUDA ANNA;MATTAAR THOMAS AUGUSTUS;PIETERSE MARTINUS THEODORUS JACOBUS;VERKOOIJEN ROB ANTONIUS ANDRIES;ASML NETHERLANDS B.V. |
发明人 |
COX HENRIKUS HERMAN MARIE;KOENEN WILLEM HERMAN GERTRUDA ANNA;MATTAAR THOMAS AUGUSTUS;PIETERSE MARTINUS THEODORUS JACOBUS;VERKOOIJEN ROB ANTONIUS ANDRIES |
分类号 |
G03B27/54;G06F15/00 |
主分类号 |
G03B27/54 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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