SELECTIVELY DEPOSITED THIN FILM DEVICES AND METHODS FOR FORMING SELECTIVELY DEPOSITED THIN FILMS

摘要

A method for selectively depositing a thin film structure on a substrate. The method includes providing a process gas to a surface of the substrate and directing concentrated electromagnetic energy from a source of energy to at least a portion of the surface. The process gas is decomposed onto the substrate to form a selectively deposited thin film structure. A thin film device and apparatus for forming a selectively deposited thin film structure are also disclosed.