发明名称 Charge coupled device camera calibrating method, involves determining respective output signals of camera for different intensities of micro-optical element, where linearity characteristic of camera is determined from output signals
摘要 The method involves irradiating a micro-optical element (110) such as diffractive optic element (DOE) or refractive optic element (ROE), with light of two different intensities from a light source, where the light source includes wavelength less than 200 Nm. Respective output signals of a charge coupled device (CCD) camera (130) for the different intensities of the micro-optical element are determined. A linearity characteristic of the CCD camera is determined from the output signals. An independent claim is also included for an arrangement for calibrating a CCD camera.
申请公布号 DE102010031215(B3) 申请公布日期 2011.12.29
申请号 DE20101031215 申请日期 2010.07.12
申请人 CARL ZEISS SMT GMBH 发明人 GERHARD, MICHAEL
分类号 H04N5/335;G01J5/00;H04N5/225 主分类号 H04N5/335
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