发明名称 |
Charge coupled device camera calibrating method, involves determining respective output signals of camera for different intensities of micro-optical element, where linearity characteristic of camera is determined from output signals |
摘要 |
The method involves irradiating a micro-optical element (110) such as diffractive optic element (DOE) or refractive optic element (ROE), with light of two different intensities from a light source, where the light source includes wavelength less than 200 Nm. Respective output signals of a charge coupled device (CCD) camera (130) for the different intensities of the micro-optical element are determined. A linearity characteristic of the CCD camera is determined from the output signals. An independent claim is also included for an arrangement for calibrating a CCD camera.
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申请公布号 |
DE102010031215(B3) |
申请公布日期 |
2011.12.29 |
申请号 |
DE20101031215 |
申请日期 |
2010.07.12 |
申请人 |
CARL ZEISS SMT GMBH |
发明人 |
GERHARD, MICHAEL |
分类号 |
H04N5/335;G01J5/00;H04N5/225 |
主分类号 |
H04N5/335 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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