| 摘要 |
<p>A pyroelectric detector includes a pyroelectric detection element (220) mounted on a first side of a support member (210) with a second side facing a cavity. The pyroelectric detection element (220) has a capacitor (230) including a first electrode (234), a pyroelectric body (232) and a second electrode (236), and an interlayer insulation layer (260) forming first and second contact holes (252,254) passing respectively through to the first and second electrodes. First and second plugs (226,228) are respectively embedded in the first and second contact holes, with first and second electrode wiring layers (222,224) are respectively connected to the first and second plugs. A thermal conductivity of material of the second electrode wiring layer is lower than a thermal conductivity of material of a portion of the second electrode connected to the second plug.</p> |
