MANUFACTURING METHOD FOR CARBON NANOTUBE

摘要

PURPOSE: A method for mass-synthesizing carbon nano-tubes at low temperatures is provided to directly mass-synthesize the carbon nano-tubes on a metal substrate without the support of a buffer layer by implementing an oxidization pre-treating process and a plasma pre-treating process with respect to the metal substrate. CONSTITUTION: A method for mass-synthesizing carbon nano-tubes at low temperatures includes the following: A metal substrate containing one or more transition metal elements of nickel, chrome, and iron is surface-oxidized in a thermal treating furnace. The oxidized metal substrate is pre-treated based on plasma. The plasma-based pre-treated metal substrate is introduced into a thermal chemical vapor deposition device and synthesizes carbon nano-tubes on the metal substrate using one or more carbon source gases of acetylene gas, methane gas, propane gas, and ethylene gas.