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发明名称
APPARATUS FOR SUPPORTING A SUBSTRATE AND APPARATUS FOR HEAT TREATMENT A SUBSTRATE INCLUDING THE SAME
摘要
申请公布号
KR101099545(B1)
申请公布日期
2011.12.28
申请号
KR20090084860
申请日期
2009.09.09
申请人
发明人
分类号
H01L21/687;H01L21/324
主分类号
H01L21/687
代理机构
代理人
主权项
地址
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