| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an intermediate for a low-molecular compound whose utilization for resist compositions is promising, and to provide a positive-type resist composition containing the low-molecular compound obtained using the intermediate. <P>SOLUTION: The intermediate is represented by the general formula(I). The positive-type resist composition contains the low-molecular compound obtained from the intermediate. <P>COPYRIGHT: (C)2007,JPO&INPIT |
