摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a high quality semiconductor ingot wherein the mixing amount of foreign matter is low by suppressing the contact between a semiconductor melt and the foreign matter in an apparatus in a manufacturing process. <P>SOLUTION: This apparatus for manufacturing the semiconductor ingot has a crucible 1 having a liquid discharge port 3 for discharging the semiconductor melt 10 at its bottom part and a casting mold 7 having an opening part communicated through the liquid discharge port 3 and a communication tube 5. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |