| 摘要 |
PROBLEM TO BE SOLVED: To provide a carbon heater superior in soaking property and flexibility, and capable of being inexpensively manufactured so that its temperature can suddenly rise or drop. SOLUTION: A heater member 11 is formed simply by knitting such a plurality of bunched carbon fibers that a plurality of carbon fibers are bunched, into a slender shape. The heater member is substantially integrated with a plate-shaped silica glass support 12 which contains impurities having ashes of 10ppm or less, which consists of a silica glass plate with the heater member wired thereon, and a silica glass plate separate from the silica glass plate and a non-transparent silica glass plate 12e arranged on the upper and lower sides thereof, which contains a non-transparent silica glass layer with fusing treatment, and in which one heater member is filled. A hollow space is formed around the heater member in the silica glass support. COPYRIGHT: (C)2009,JPO&INPIT |
