| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrode structure for oscillation which loosens a thermal stress impressed to dielectrics, accompanying a high outputting of a gas-laser oscillation system used for a gas-laser finishing machine. SOLUTION: Dielectrics 3a, 3b are attached in vacuum-tightness with tie bolts 5 via fixtures 4a, 4b. The dielectrics 3a, 3b have stepped portions 30 on flange surfaces 21 of containers 2a, 2b containing electric discharge electrodes 1a, 1b which are made to face and are provided in a discharge space 55. In the fixtures 4a, 4b, there are provided a first projection 41 contacting the stepped portion 30 of the dielectric 3a with a predetermined clearance S and a second projection 42 contacting to the flange surface 21 of the dielectric 3b having a predetermined clearance S2. COPYRIGHT: (C)2010,JPO&INPIT |
