| 摘要 |
<p>A device for manufacturing a SiC single crystal includes: a raw material gas introduction pipe (4); a raw material gas heat chamber (8) having a raw material gas supply passage (12) for heating the gas in the passage; a reaction chamber (10) having a second sidewall (10a), an inner surface of which contacts an outer surface of a first sidewall (8c) of the heat chamber (8), and having a bottom, on which a SiC single crystal substrate (13) is arranged; and a discharge pipe (9) in a hollow center of the raw material gas heat chamber (8). The supply passage (12) is disposed between an outer surface of the discharge pipe (9) and an inner surface of the first sidewall (8c). The discharge pipe (9) discharges a residual gas, which is not used for crystal growth of the SiC single crystal.</p> |
