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发明名称
Disk unit for cleaning a substrate and cleaning apparatus having the same
摘要
申请公布号
KR101099591(B1)
申请公布日期
2011.12.28
申请号
KR20100001701
申请日期
2010.01.08
申请人
发明人
分类号
B08B1/04;B08B3/10;H01L21/302
主分类号
B08B1/04
代理机构
代理人
主权项
地址
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