METHOD FOR FILM FORMATION, APPARATUS FOR FILM FORMATION, AND RECORDING MEDIUM,申请号KR20097020415-传众专利搜索

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发明名称	METHOD FOR FILM FORMATION, APPARATUS FOR FILM FORMATION, AND RECORDING MEDIUM
摘要
申请公布号	KR101099928(B1)	申请公布日期	2011.12.28
申请号	KR20097020415	申请日期	2008.03.13
申请人		发明人
分类号	C23C16/44;H01L21/205	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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