发明名称 METHOD FOR MANUFACTURING SAPPHIRE SUBSTRATE, AND SEMICONDUCTOR DEVICE
摘要 In a semiconductor device fabricated by growing a compound semiconductor layer on a sapphire substrate, a sapphire substrate enabling the semiconductor device to have a high light-extraction efficiency is provided. A plurality of projections 2, 2, . . . are provided at random on a surface of a sapphire substrate 1, and a GaN layer 10 is grown on this surface. Then, a multi-quantum well layer 12, a p-AlGaN layer 14, a p-GaN layer 16, and an ITO layer 18 are formed on the GaN layer 10, and two electrodes 21 and 22 are also formed. In this manner, a semiconductor light-emitting device is fabricated.
申请公布号 KR20110139250(A) 申请公布日期 2011.12.28
申请号 KR20117023524 申请日期 2010.02.09
申请人 YAMAGUCHI UNIVERSITY 发明人 TADATOMO KAZUYUKI;OKADA NARIHITO
分类号 C30B33/12;C23C14/14;C23C14/58;H01L21/3065 主分类号 C30B33/12
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