发明名称 |
Projection system with a polarization-modulating element having a variable thickness profile |
摘要 |
<p>Methods of producing a polarization-modulating element that modulates a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being used with an illumination optical apparatus, include preparing an optical material having optical activity, and providing the optical material with a circumferentially varying thickness profile and a central region that is an aperture having no optical activity. The thickness profile is set so that light in a linearly polarized state having a direction of polarization substantially along a single direction, is transformed into light in an azimuthal polarization state having a direction of polarization substantially along a circumferential direction or into light in a radially polarized state having a direction of polarization substantially along the radial direction.</p> |
申请公布号 |
EP1716457(B1) |
申请公布日期 |
2011.12.28 |
申请号 |
EP20050706888 |
申请日期 |
2005.01.14 |
申请人 |
CARL ZEISS SMT GMBH |
发明人 |
FIOLKA, DAMIAN;DEGUENTHER, MARKUS |
分类号 |
G03F7/20;G02B1/08;G02B5/30;G02B27/28;G02F1/01 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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