MODULAR BARRIER REMOVAL POLISHING SLURRY,申请号KR20057014900-传众专利搜索

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发明名称	MODULAR BARRIER REMOVAL POLISHING SLURRY
摘要
申请公布号	KR101099721(B1)	申请公布日期	2011.12.28
申请号	KR20057014900	申请日期	2004.02.23
申请人		发明人
分类号	C09K3/14;C09G1/02;H01L21/304;H01L21/306;H01L21/3105;H01L21/321	主分类号	C09K3/14
代理机构		代理人
主权项
地址

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