| 摘要 |
Disclosed is a positive radiation-sensitive composition for use in a discharge nozzle coating method, said positive radiation sensitive composition containing: a polymer [A] having, in the same or different polymer molecules, a structural unit (I) containing a group represented by formula (1), and an epoxy group-containing structural unit; at least one compound [B] selected from a group comprising oxime sulfonate compounds and onium salt compounds; and an organic solvent [C]. The concentration of solid content is 10 - 30 mass%, and the viscosity at 25? is 2.0 mPa°s-12 mPa°s, and at least an organic solvent (C1) having a vapor pressure of at least 0.1 mmHg and less than 1 mmHg at 20? is used as the organic solvent [C]. |
