| 摘要 |
PROBLEM TO BE SOLVED: To provide a discharge excitation type pulse oscillation gas laser apparatus capable of suppressing the increase of gas flow speed required and the increase of power to be supplied to a fan, and attaining a highly repetitive operation by not less than 4 kHz and long-term usage. SOLUTION: Oblong anode and cathode of the discharge excitation type pulse oscillation gas laser apparatus whose discharge surface shapes are projected and curved on a cross sectional surface to be orthogonally crossed with the longitudinal direction of electrodes, and the relation of g/We>3 is obtained at the width We of the electrode of ground potential and the minimum interval g of discharge electrodes. The apparatus is provided with a power source supplying power with the density of not less than 50 mJ/cm<SP>3</SP>to a part between the discharge electrodes by the number of pulse repetition being not less than 4 kHz. The curved line shape of the projected surface of the discharge surfaces is an oval, a hyperbolic curve, or a high-order function which is expressed by x<SP>N</SP>/(We/2)<SP>N</SP>+y<SP>N</SP>/h<SP>N</SP>=1 (h is the height of an electrode curved line part, x is a position coordinate in the width direction of the electrode, y is a coordinate in the projected surface direction of the electrode, and N is an integer being not less than 3). WhenΔE is equal to a difference in electric field strength and Eave is equal to an electric field strength average value in an electrode width,ΔE/Eave being the rate is not more than 35%. COPYRIGHT: (C)2007,JPO&INPIT |
