发明名称 Blocking member for use in the diffraction plane of a TEM
摘要 The invention relates to a blocking member to be placed in the diffraction plane of a TEM. It resembles the knife edge used for single sideband imaging, but blocks only electrons deflected over a small angle. As a result the Contrast Transfer Function of the TEM according to this invention will equal that of a single sideband microscope at low frequencies and that of a normal microscope for high frequencies. Preferable the highest frequency blocked by the blocking member is such that a microscope without the blocking member would show a CTF of 0.5.
申请公布号 EP2400522(A1) 申请公布日期 2011.12.28
申请号 EP20100167258 申请日期 2010.06.24
申请人 FEI COMPANY 发明人 TIEMEIJER, PETER;BUIJSSE, BART
分类号 H01J37/09;H01J37/26 主分类号 H01J37/09
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