摘要 |
<p>A chip cooling system 10 including a semiconductor device 12 having a bulk region 14, wherein at least one fluid channel 16 extends at least partially through the bulk region 14, the fluid channel 16 having an inlet 18 and an outlet 20, a fluid inlet port 36 in fluid communication with the channel inlet 18, and a fluid outlet port 38 in fluid communication with the channel outlet 20, and a cooling fluid flows from the fluid inlet port 36, through the fluid channel 16 and to the fluid outlet port 38 to cool the bulk region 14.</p> |