发明名称 Methods of forming dispersions of nanoparticles, and methods of forming flash memory cells
摘要 Some embodiments include methods of forming dispersions of nanoparticles. The nanoparticles are incorporated into first coordination complexes in which the nanoparticles are coordinated to hydrophobic ligands, and the first coordination complexes are dispersed within a non-polar solvent. While the first coordination complexes are within the non-polar solvent, the ligands are reacted with one or more reactants to convert the first coordination complexes into second coordination complexes that contain hydrophilic ligands. The second coordination complexes are then extracted from the non-polar solvent into water, to form a mixture of the second coordination complexes and the water. In some embodiments, the mixture may be dispersed across a semiconductor substrate to form a uniform distribution of the nanoparticles across the substrate. In some embodiments, the nanoparticles may then be incorporated into flash memory devices as charge-trapping centers.
申请公布号 US8084345(B2) 申请公布日期 2011.12.27
申请号 US20100871838 申请日期 2010.08.30
申请人 MILLWARD DAN;MICRON TECHNOLOGY, INC. 发明人 MILLWARD DAN
分类号 H01L21/3205;H01L21/4763 主分类号 H01L21/3205
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