发明名称 Structure and fabrication of like-polarity field-effect transistors having different configurations of source/drain extensions, halo pockets, and gate dielectric thicknesses
摘要 A group of high-performance like-polarity insulated-gate field-effect transistors (100, 108, 112, 116, 120, and 124 or 102, 110, 114, 118, 122, and 126) have selectably different configurations of lateral source/drain extensions, halo pockets, and gate dielectric thicknesses suitable for a semiconductor fabrication platform that provides a wide variety of transistors for analog and/or digital applications. Each transistor has a pair of source/drain zones, a gate dielectric layer, and a gate electrode. Each source/drain zone includes a main portion and a more lightly doped lateral extension. The lateral extension of one of the source/drain zones of one of the transistors is more heavily doped or/and extends less deeply below the upper semiconductor surface than the lateral extension of one of the source/drain zones of another of the transistors.
申请公布号 US8084827(B2) 申请公布日期 2011.12.27
申请号 US20090382971 申请日期 2009.03.27
申请人 BULUCEA CONSTANTIN;FRENCH WILLIAM D.;ARCHER DONALD M.;YANG JENG-JIUN;BAHL SANDEEP R.;PARKER D. COURTNEY;NATIONAL SEMICONDUCTOR CORPORATION 发明人 BULUCEA CONSTANTIN;FRENCH WILLIAM D.;ARCHER DONALD M.;YANG JENG-JIUN;BAHL SANDEEP R.;PARKER D. COURTNEY
分类号 H01L29/76;H01L29/94;H01L31/062;H01L31/113;H01L31/119 主分类号 H01L29/76
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