IMPRINT APPARATUS

摘要

PURPOSE: An imprint apparatus is provided to uniformly combine a combination surface with a stamp by measuring an elastic force at an elastic force support unit. CONSTITUTION: A stamp(2) includes an imprint surface. A stage(4) is arranged at the bottom of the stamp. A driving unit(6) is operated at the stage in order to move the stamp. A support plate(8) is arranged at the upper side of the stamp. An elastic force support unit(10) supports the bottom of the stage elastically. A pressure measurement unit(12) measures the stage and the stamp.