| 摘要 |
The inventive method for producing multidimensional calibrating patterns stable to modifications of properties affecting measuring results of a device consists in forming a set of samples for computing correction relationships, in measuring primary properties of each sample prior to and after inserting modifications, in comparing the results of measurement of the primary properties of the samples obtained prior to inserting modifications with results of measurement of the primary properties of the same samples obtained after inserting modifications by means of multidimensional regression analysis methods and in determining the correction relationships. The inventive method also consists in subsequently selecting a calibrating set of samples exhibiting the known secondary properties, in measuring the primary properties of each sample of the calibrating set prior to and after inserting changes into at least one property affecting measurement results of a device, it translating, by means of the obtained correction relationships, the results of measurement of the primary properties of the samples of the calibrating set to a form corresponding to the measurements, which are carried out by means of the device after inserting modifications and which are thereby adjusted according to the state of the device modified by the results of measurement of the primary properties of the calibration set samples obtained on the device prior to inserting modifications, in calculating a multidimensional calibration pattern according to the totality of initial and adjusted results of measurement of the primary properties of the calibration set samples and in verifying said pattern by determining quantitative validations of calibration according thereto. |
