发明名称 |
APPARATUS FOR SCRIBING A SUBSTRATE AND METHOD FOR SCRIBING THE SUBSTRATE USING THE SAME |
摘要 |
PURPOSE: A substrate cutting apparatus and a substrate cutting method using the same are provided to improve the efficiency of a substrate cutting process by including a first blade and a second blade which are composed in order to have a different cutting condition each other. CONSTITUTION: A cutting part comprises a first blade(112) and a second blade(114). The first blade is perpendicularly arranged about a substrate(10). The second blade is parallel to the first blade. A driving part(120) respectively runs the first blade and the second blade. A controller(130) controls the driving part so that the second blade cuts a scribe region of the substrate in which a first blade cuts while the second blade follows the first blade. A first rotating axis rotates the first blade by being combined with the first blade. A second rotating axis rotates the second blade by being combined with the second blade.
|
申请公布号 |
KR20110137574(A) |
申请公布日期 |
2011.12.23 |
申请号 |
KR20100057582 |
申请日期 |
2010.06.17 |
申请人 |
SAMSUNG ELECTRO-MECHANICS CO., LTD. |
发明人 |
YUN, TAEK HEE;YANG, SI JOONG |
分类号 |
H01L21/78;B24B27/06 |
主分类号 |
H01L21/78 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|