发明名称 APPARATUS FOR SCRIBING A SUBSTRATE AND METHOD FOR SCRIBING THE SUBSTRATE USING THE SAME
摘要 PURPOSE: A substrate cutting apparatus and a substrate cutting method using the same are provided to improve the efficiency of a substrate cutting process by including a first blade and a second blade which are composed in order to have a different cutting condition each other. CONSTITUTION: A cutting part comprises a first blade(112) and a second blade(114). The first blade is perpendicularly arranged about a substrate(10). The second blade is parallel to the first blade. A driving part(120) respectively runs the first blade and the second blade. A controller(130) controls the driving part so that the second blade cuts a scribe region of the substrate in which a first blade cuts while the second blade follows the first blade. A first rotating axis rotates the first blade by being combined with the first blade. A second rotating axis rotates the second blade by being combined with the second blade.
申请公布号 KR20110137574(A) 申请公布日期 2011.12.23
申请号 KR20100057582 申请日期 2010.06.17
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 YUN, TAEK HEE;YANG, SI JOONG
分类号 H01L21/78;B24B27/06 主分类号 H01L21/78
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