TESTING DEVICE, TESTING METHOD, COMPUTER PROGRAM AND RECORDING MEDIUM RECORDING PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a testing device capable of determining non-defective or defective in high accuracy even when variation among lots and/or variation within a wafer surface exist.

SOLUTION: A testing device includes: a reference space creation part 22 for creating reference spaces for each chip number attached to chips in a wafer out of test data of non-defective chips in the first lot; a reference value extraction part 25 for extracting test items effective for the respective reference spaces and reference values for non-defective/defective determination corresponding to the test items out of the test data of the defective chips in the first lot corresponding to the reference spaces created by the reference space creation part 22; and a non-defective/defective determination part 26 for calculating an average of Mahalanobis distances for the respective reference spaces for each chip number to determine non-defective or defective for the chips in the second lot using the reference value corresponding to the reference space for which the average value is minimum. Therefore, the determination of non-defective or defective in high accuracy is possible even when variation among the lots and/or variation within the wafer surface exist.

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