| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate with a joint membrane including the joint membrane capable of being efficiently joined to a body to be adhered at a low temperature with high dimension accuracy and being strongly joined, a joining method capable of efficiently and strongly joining the substrate with the joint membrane and the body to be adhered at a low temperature, and a joined assembly with high reliability in which the substrate with the joint membrane and the body to be adhered are strongly joined with high dimension accuracy. <P>SOLUTION: The substrate 1 with the joint membrane includes the substrate 2 and the joint membrane 3 containing a Si skeleton and an eliminative group comprising an organic group. The adhesion property to the other body to be adhered is exhibited in an area of the surface of the joint membrane 3 by exposing the joint membrane 3 to plasma and eliminating the eliminative group from the Si skeleton. When the joint membrane 3 after it is exposed to plasma is measured by an IR absorption spectrum method and the peak intensity belonging to a Si-O-Si bond is made to be 1, the peak intensity belonging to a methyl group is ≥0.12 and ≤0.17. <P>COPYRIGHT: (C)2012,JPO&INPIT |
