| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a circulation purifying apparatus capable of reducing the amount of adsorption of impurity in a purification part after self-circulation operation. <P>SOLUTION: The circulation purifying apparatus is provided with a purification cylinder 31 for purifying an inert gas by receiving the inert gas discharged from a box G into each of a plurality of circulation circuits and removing impurities contained in the inert gas. Also, the circulation purifying apparatus is provided with a self-circulation circuit for circulating an inert gas without making the inert gas to pass through a box G, and the self-circulation circuit is connected to a vacuum pump 71 through a branched pressure relief pipe 74, and is provided with a valve 59 on the branched pressure relief pipe 74. Then, a controller 23 executes an evacuation treatment of the self-circulation circuit by the vacuum pump 71 through the branched pressure relief pipe 74 by setting the valve 59 to an open state. <P>COPYRIGHT: (C)2012,JPO&INPIT |
