| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate with a joint membrane including the joint membrane capable of being efficiently joined to a body to be adhered at a low temperature with high dimension accuracy and being strongly joined, a joining method capable of efficiently and strongly joining the substrate with the joint membrane and the body to be adhered at a low temperature, and a joined assembly with high reliability in which the substrate with the joint membrane and the body to be adhered are strongly joined with high dimension accuracy. <P>SOLUTION: The substrate 1 with the joint membrane includes the substrate 2 and the joint membrane 3 including a Si skeleton and an eliminative group comprising an organic group. Adhesion property with the other body to be adhered is exhibited in an area of a surface of the joint membrane 3 by irradiating the joint membrane 3 with UV rays and eliminating the eliminative group from the Si skeleton. When the joint membrane 3 after irradiated with the UV rays is measured by an IR absorption spectrum method and peak intensity belonging to a Si-O-Si bond is made to be 1, to peak intensity belonging to a methyl group is ≥0.04 and ≤0.12. <P>COPYRIGHT: (C)2012,JPO&INPIT |
