发明名称 Semiconductor Device With Resistor Pattern And Method Of Fabricating The Same
摘要 Disclosed is a semiconductor device with a resistor pattern and methods of fabricating the same. Embodiments of the present invention provide a method of fabricating a resistor pattern having high sheet resistance by using a polycide layer for a gate electrode in a semiconductor device with the resistor pattern. Embodiments of the invention also provide a semiconductor device with a resistor pattern that is formed narrower than the minimum line width that can be defined in a photolithographic process so that sheet resistance thereof increases, and a method of fabricating the same.
申请公布号 US2011309433(A1) 申请公布日期 2011.12.22
申请号 US201113223689 申请日期 2011.09.01
申请人 发明人 SHIN YOO-CHEOL
分类号 H01L27/02;H01L29/792;H01L21/8246;H01L21/8247;H01L27/06;H01L27/108;H01L27/115 主分类号 H01L27/02
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