STATIC ELIMINATOR OF WAFER AND STATIC ELIMINATION METHOD OF WAFER

摘要

PROBLEM TO BE SOLVED: To prevent impurities deposited in a tip of an electrode needle of an ionizer using corona discharge from dropping on a wafer surface.

SOLUTION: A static eliminator of a wafer is used. The static eliminator of a wafer includes: a cover 13 covering above a prealigner 1; and an ion supply part 14 disposed on a periphery of the cover 13 or below the periphery. An ion supply port 15 of the ion supply part 14 is arranged to face a space formed between the cover 13 and the prealigner 1.

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