| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a circulation purifying apparatus capable of carrying out a reduction regenerating treatment of an optional purification cylinder in a plurality of the purification cylinder. <P>SOLUTION: The circulation purifying apparatus 11 is provided with the purification cylinder 31 for purifying an inert gas by receiving the inert gas discharged from a box G into each of a plurality of circulation circuits C1-C4 and removing impurities contained in the inert gas. Also, the circulation purifying apparatus 11 is provided with a controller 23 for carrying out the control concerning the circulation in the plurality of circulation circuits C1-C4 and the controller 23 achieves, from the one optional purification cylinder 31 in the plurality of the purification cylinders 31, the reduction regenerating treatment for reducing and regenerating the one purification cylinder 31. <P>COPYRIGHT: (C)2012,JPO&INPIT |
