| 摘要 |
<P>PROBLEM TO BE SOLVED: To adjust a tilt of a sensor part of a Talbot interferometer with high accuracy. <P>SOLUTION: The Talbot interferometer guides light that is emitted by a light source 1 and passes through an inspection-object optical system L to a sensor part M that includes a diffraction grating 3 and an image pickup device 4 to measure a wave front of the inspection-object optical system. The interferometer includes: mechanisms 7, 8 for setting a positional relationship between the inspection-object optical system and the sensor part in a direction along an optical axis OA to achieve a positional relationship which is different from the one at the time of measuring the wave front and in which the image pickup device is disposed at the image point position of the inspection-object optical system; a measurement unit 5 for measuring light quantity distribution of diffraction light from the diffraction grating on the image pickup device using the image pickup device; a correction amount calculation unit 5 for calculating an amount of tilt correction of the sensor part using the measurement results of the light quantity distribution; and a mechanism 9 for performing tilt correction of the sensor part relative to the optical axis by an amount that corresponds to the tilt correction amount. <P>COPYRIGHT: (C)2012,JPO&INPIT |
