| 摘要 |
The present invention provides high-resolution wavefront measurement systems and methods for real-time inspection of optical and geometrical properties of specular and transparent objects, the systems of the invention comprising at least one illumination apparatus, at least one imaging apparatus constructed and configured to image the object onto an image plane, at least one gradient element disposed at one of the aperture stops of the imaging apparatus; and a sensor placed in the image plane of the imaging apparatus, wherein the sensor is capable of differentiating between different areas of the gradient element thereby being adapted to provide real-time optical and geometrical data of the object.
|
