发明名称 |
NON-LINEARITY DETERMINATION OF POSITIONING SCANNER OF MEASUREMENT TOOL |
摘要 |
Determination of non-linearity of a positioning scanner of a measurement tool is disclosed. In one embodiment, a method may include providing a probe of a measurement tool coupled to a positioning scanner; scanning a surface of a first sample with the surface at a first angle relative to the probe to attain a first profile; scanning the surface of the first sample with the surface at a second angle relative to the probe that is different than the first angle to attain a second profile; repeating the scannings to attain a plurality of first profiles and a plurality of second profiles; and determining a non-linearity of the positioning scanner using the different scanning angles to cancel out measurements corresponding to imperfections due to the surface of the sample. The non-linearity may be used to calibrate the positioning scanner. |
申请公布号 |
US2011314576(A1) |
申请公布日期 |
2011.12.22 |
申请号 |
US201113217579 |
申请日期 |
2011.08.25 |
申请人 |
BANKE, JR. GEORGE W.;ROBERT JAMES M.;STROCCHIA-RIVERA CARLOS;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BANKE, JR. GEORGE W.;ROBERT JAMES M.;STROCCHIA-RIVERA CARLOS |
分类号 |
G01B21/30;G01B5/28;G01Q10/00;G06F19/00 |
主分类号 |
G01B21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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