QUARTZ GLASS CRUCIBLE FOR PULLING SILICON SINGLE CRYSTALS, AND MANUFACTURING METHOD THEREOF

摘要

Disclosed is a quartz glass crucible used for pulling silicon single crystals and capable of efficiently suppressing liquid surface vibration when pulling silicon single crystals; also disclosed is a manufacturing method of said quartz glass crucible. The disclosed quartz glass crucible for pulling silicon single crystals grows silicon single crystals by bringing a seed crystal into contact with a silicon melt and performing pulling. Said crucible includes a crucible base body of a semitransparent quartz glass layer, and a transparent synthetic quartz glass layer formed on the inner walls of the crucible base body; said crucible further has a straight body portion open at the top, and a bottom portion formed in an arc shape on said straight body. A rough surface band region is provided on one portion of the surface of the straight body portion of the transparent synthetic quartz glass layer, and the region of the surface of the transparent synthetic quartz glass layer that is below the rough surface band region is smooth. The arithmetic mean roughness (Ra) of the rough surface band region is 2-9µm, and the rough surface band region is provided such that the liquid surface of the silicon melt in an initial state is in contact with the rough surface band region.