ARTICLE COVERED WITH DIAMOND-LIKE CARBON FILM

摘要

Provided is a diamond-like-carbon-film covered article in which the diamond-like carbon film adheres excellently to the article body. The disclosed diamond-like-carbon-film covered article (W) is covered at least partially with a diamond-like carbon film that is formed through the intermediary of an intermediate layer made of an amorphous silicon carbide film. The amorphous silicon carbide film and the diamond-like carbon film are formed through plasma CVD using asymmetric pulse power as discharge power. The amorphous silicon carbide film exhibits a peak in spectral intensity in the Raman shift range of 1400 cm-1 to 1600 cm-1 in laser Raman spectroscopic analysis using a laser having a wavelength of 532 nm.