METHOD OF PRODUCING PATTERNED BODY, METHOD OF MANUFACTURING FUNCTIONAL ELEMENT AND METHOD OF MANUFACTURING SEMICONDUCTOR ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide an efficient method of producing a patterned body capable of high definition patterning.

SOLUTION: The method of producing a patterned body comprises: a photoresist patterning step of forming a photoresist pattern on a hydrophobic layer having a surface exhibiting hydrophobicity; a hydrophilization step of forming a hydrophilic region by irradiating the surface of the hydrophobic layer on which the photoresist pattern is formed with energy thereby hydrophilizing the surface; and a photoresist pattern peeling step of peeling the photoresist pattern and forming, on the surface of the hydrophobic layer, a hydrophilic/hydrophobic pattern where the hydrophilic region and a hydrophobic region covered with the photoresist pattern in hydrophilization step are formed in pattern shape.

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