| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high frequency vibration piezoelectric device which can be manufactured easily and which can accurately detect ultrasonic waves having a frequency of about 25-50 MHz, a ultrasonic sensor, and a manufacturing method for the high frequency vibration piezoelectric device. <P>SOLUTION: A high frequency vibration piezoelectric device 105 of an array type which allows for detection of vibration of ultrasonic waves and echo waves from observation objects has a vibrator array formed by a plate-shaped piezoelectric body structure integrally formed as a lattice window. Thus the high frequency vibration piezoelectric device 105 can keep the parallelism of the vibrator array, heighten the flatness of the vibrator array, and make a piezoelectric body 107 thin, because the vibrator array is integrally formed as the lattice window. As a result, the ultrasonic waves having a frequency of about 25-50 MHz can be accurately detected. Also, the trouble to arrange a vibrator 110 can be spared, so the piezoelectric device 105 can be easily manufactured in terms of the process. <P>COPYRIGHT: (C)2012,JPO&INPIT |
