| 摘要 |
A gas supply passage 13 for supplying a gas is connected to a decontamination liquid supply passage 5 at a tail end portion 5a side from delivery means 4, and an on-off valve 14 which opens and closes the gas supply passage is provided. Control means 3 stores a housed weight R of the decontamination liquid which is housed in the decontamination liquid supply passage between a connection point A at which the above described gas supply passage is connected to the decontamination liquid supply passage and the above described tail end portion 5a. When a weight of the decontamination liquid is reduced by a total value of a predetermined weight W which should be supplied to the downstream side equipment and the above described housed weight R as a result of starting supply of the decontamination liquid to the above described downstream side equipment, the control means opens the above described on-off valve to return the decontamination liquid at the upstream side from the connection point, that is, the decontamination liquid of the housed weight R to the decontamination liquid storing means, while supplying the decontamination liquid of the predetermined weight W to the downstream side equipment. The air purge operation and the air purge piping which have been conventionally required can be omitted.
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