METHOD FOR PRODUCING COMPOSITE SUBSTRATE AND COMPOSITE SUBSTRATE

摘要

In the disclosed method, a monocrystalline substrate group (10) of which each has a front surface and a rear surface is prepared. The monocrystalline substrate group (10) is disposed in a manner so that each of the front surfaces of the monocrystalline substrate group (10) is tilted with respect to the others. This disposition is performed in a manner so that the front surface of each of the monocrystalline substrate group (10) overall forms either a convex surface shape or a concave surface shape. The back surface of each of the monocrystalline substrate group (10) and a base substrate (30) are caused to be facing. The back surface of each of the monocrystalline substrate group (10) and the base substrate (30) are joined.