发明名称 DUAL-FILM STRUCTURE FTO PRODUCTION METHOD
摘要 <p>The present invention relates to a dual-film structure FTO production method, and the invention comprises the steps of: heating a substrate to between 400 and 500 degrees; producing flat FTO by spraying a precursor containing Sn onto the heated substrate; heating the flat FTO film to at least between 500 and 550 degrees; and forming an FTO nanorod layer by spraying a precursor containing Sn onto the heated FTO substrate. A characterising feature of the present invention is that a polycrystalline FTO film is formed in the bottom part, and a nanorod FTO layer is formed by being grown on the polycrystalline FTO film.</p>
申请公布号 WO2011158995(A1) 申请公布日期 2011.12.22
申请号 WO2010KR06305 申请日期 2010.09.15
申请人 SOLARCERAMIC CO., LTD.;SONG, CHUL KYU 发明人 SONG, CHUL KYU
分类号 H01L31/042 主分类号 H01L31/042
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