| 摘要 |
<p>Provided is a variable capacitance device which can prevent a failure of a MEMS, caused due to an electrostatic charge, and can easily maintain a constant correlation between a drive capacitance and a radio frequency (RF) capacitance. A variable capacitance device (1) is provided with a support plate (2), a movable beam (3), drive capacitance units (C2A, C2B), RF capacitance units (C1A, C1B), a stopper unit (12), and unipotential electrodes (9A, 9B). The movable beam (3) has a cantilever beam structure parallel to the main surface of the support plate (2). The stopper unit (12) is provided so that the longitudinal direction thereof is along the main axis direction of the movable beam, on the area of a dielectric film (8) opposite to the drive capacitance electrodes (7A, 7B) constituting the drive capacitance units (C2A, C2B), via a gap. The unipotential electrodes (9A, 9B) are opposite to the area on which the stopper unit (12) is provided, via the dielectric film (8), and are connected to the drive capacitance electrodes (7A, 7B) at the same potential.</p> |
