SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STORAGE MEDIUM STORING SUBSTRATE PROCESSING PROGRAM

摘要

PURPOSE: A substrate processing apparatus and method and a recording medium which records a substrate processing program are provided to shorten time which is required for the return of a substrate by holding a plurality of substrates in a substrate holder at the same time. CONSTITUTION: A substrate transfer bar(11) mounts a plurality of substrates. Substrate processing chambers(15,16) process the substrate one by one. A substrate returning apparatus(36) carries the substrate from the substrate transfer bar to the each substrate processing chamber. The substrate returning apparatus takes out the substrate from each substrate processing chamber to the substrate transfer bar. A substrate holder is installed in the substrate returning apparatus.